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Title:
INTEGRATED FESEM AND LDI-TOF-MS ANALYSIS SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/214637
Kind Code:
A1
Abstract:
The present invention relates to an integrated FESEM and LDI-TOF-MS analysis system, and provides an integrated FESEM and LDI-TOF-MS analysis system that can perform FESEM analysis and LDI-TOF-MS analysis on a single sample to be analyzed without exposing the sample to the atmosphere.

Inventors:
KIM SOEUN (KR)
YOUN YEU YOUNG (KR)
KIM MINKYOUNG (KR)
CHAE BYUNG JOON (KR)
Application Number:
PCT/KR2022/021138
Publication Date:
November 09, 2023
Filing Date:
December 23, 2022
Export Citation:
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Assignee:
LG ENERGY SOLUTION LTD (KR)
International Classes:
G01N23/225; G01N23/2204; G01N23/2206; G01N27/64; H01J49/04
Foreign References:
KR20120041587A2012-05-02
JP2001153760A2001-06-08
KR20130086041A2013-07-30
JPH05224131A1993-09-03
US20070057182A12007-03-15
KR20220054691A2022-05-03
Attorney, Agent or Firm:
KIM, Aera (KR)
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