Title:
INTEGRATED MANAGEMENT SYSTEM, MANAGEMENT DEVICE, METHOD FOR DISPLAYING INFORMATION FOR SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2014/050808
Kind Code:
A1
Abstract:
In order to easily formulate energy conservation measures for a substrate processing machine by storing various types of information collected from the substrate processing machine, using the stored data, and displaying the information required for energy conservation by the substrate processing device located in a semiconductor manufacturing plant, an integrated management system is provided that is equipped with, for example, a management device including: a substrate processing device for processing a substrate; a storage unit for storing various types of information including power-consumption information relating to the power consumed by the substrate processing device, gas-consumption information relating to the gas consumed by the substrate processing device, or operation information relating to the operation status of the substrate processing device; and a process display unit for acquiring information fulfilling a prescribed condition from the information stored in the storage unit, and calculating at least one of the power consumption amount consumed by the substrate processing device, the inactive-gas consumption amount, and the device operation rate of the substrate processing device.
Inventors:
NAKANO MINORU (JP)
SAITOH TSUYOSHI (JP)
SAITOH TSUYOSHI (JP)
Application Number:
PCT/JP2013/075686
Publication Date:
April 03, 2014
Filing Date:
September 24, 2013
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC (JP)
International Classes:
H01L21/02; G05B19/418
Foreign References:
| JPH10135092A | 1998-05-22 | |||
| JP2011090571A | 2011-05-06 | |||
| JP2012160056A | 2012-08-23 |
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