Title:
INTEGRATED MULTI-PASS INSPECTION
Document Type and Number:
WIPO Patent Application WO/2014/186476
Kind Code:
A3
Abstract:
Methods and systems for integrated multi-pass reticle inspection are provided. One method for inspecting a reticle includes acquiring at least first, second, and third images for the reticle. The first image is a substantially high resolution image of light transmitted by the reticle. The second image is a substantially high resolution image of light reflected from the reticle. The third image is an image of light transmitted by the reticle that is acquired with a substantially low numerical aperture. The method also includes detecting defects on the reticle using at least the first, second, and third images for the reticle in combination.
Inventors:
SOUSA WESTON L (US)
XIONG YALIN (US)
SHI RUI-FANG (US)
XIONG YALIN (US)
SHI RUI-FANG (US)
Application Number:
PCT/US2014/038017
Publication Date:
March 26, 2015
Filing Date:
May 14, 2014
Export Citation:
Assignee:
KLA TENCOR CORP (US)
International Classes:
H01L21/66
Foreign References:
| US20080170773A1 | 2008-07-17 | |||
| US20120086799A1 | 2012-04-12 | |||
| US20010019625A1 | 2001-09-06 | |||
| US20080018883A1 | 2008-01-24 | |||
| US20130077086A1 | 2013-03-28 |
Attorney, Agent or Firm:
MEWHERTER, Ann, Marie et al. (P.O. Box 2250New York, NY, US)
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