Title:
INTEGRATED TOOL WITH INTERCHANGEABLE WET PROCESSING COMPONENTS AND AUTOMATED CALIBRATION SYSTEMS
Document Type and Number:
WIPO Patent Application WO2004108353
Kind Code:
A3
Abstract:
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
Inventors:
WOODRUFF DANIEL J (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)
MATTSON DAVID P (US)
ERICKSON JAMES J (US)
EGLOFF MATHEW C (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)
MATTSON DAVID P (US)
ERICKSON JAMES J (US)
EGLOFF MATHEW C (US)
Application Number:
PCT/US2004/017760
Publication Date:
May 11, 2006
Filing Date:
June 04, 2004
Export Citation:
Assignee:
SEMITOOL INC (US)
WOODRUFF DANIEL J (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)
MATTSON DAVID P (US)
ERICKSON JAMES J (US)
EGLOFF MATHEW C (US)
WOODRUFF DANIEL J (US)
DAVIS JEFFRY ALAN (US)
HARRIS RANDY (US)
MATTSON DAVID P (US)
ERICKSON JAMES J (US)
EGLOFF MATHEW C (US)
International Classes:
C12N15/31; C23F1/00; H01L21/00; B24B; (IPC1-7): C23F1/00; C25B9/00; H01L21/306
Foreign References:
| US5733024A | 1998-03-31 | |||
| US6312522B1 | 2001-11-06 | |||
| US20010032788A1 | 2001-10-25 | |||
| US6900132B2 | 2005-05-31 |
Other References:
See also references of EP 1635988A4
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