Title:
INTERFEROMETRIC THREE-DIMENSIONAL PROFILE SOLVING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/088409
Kind Code:
A1
Abstract:
An interferometric three-dimensional profile solving method, comprising: S1, calibrating an interferometer to obtain a peak spatial offset Δl of the interferometer; S2, using the interferometer to acquire a time-sequence interferogram array of each pixel acquisition point P (x i and y j) on a to-be-measured target, the time-sequence interferogram array being N interference images with interference fringes; S3, obtaining a zero-level sub-envelope curve and a potential zero-level sub-envelope curve of the time-sequence interferogram array; S4, using the zero-level sub-envelope curve to obtain a zero-level extreme point z 0 (x i, y j) of the zero-level sub-envelope curve; and S5, solving for an elevation position z d (x i, y j) of the to-be-measured target according to the zero-stage extreme point z 0 (x i, y j). Since solving is carried out in the spatial domain, large amounts of frequency-domain calculations such as Fourier transform and convolution are avoided, and the real-time performance of the algorithm is improved. High fitting precision is achieved by fitting the sub-envelope curve, and thus the method can be used to solve for the three-dimensional profile of the surface of a low-reflectivity object.
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Inventors:
YAO DONG (CN)
LIANG HANGANG (CN)
LIANG HANGANG (CN)
Application Number:
PCT/CN2022/132783
Publication Date:
May 25, 2023
Filing Date:
November 18, 2022
Export Citation:
Assignee:
CHANGCHUN INST OPTICS FINE MECH & PHYSICS CAS (CN)
International Classes:
G01B11/24
Foreign References:
| CN114088010A | 2022-02-25 | |||
| CN113066083A | 2021-07-02 | |||
| CN108759709A | 2018-11-06 | |||
| CN109163672A | 2019-01-08 | |||
| CN113091634A | 2021-07-09 | |||
| CN113446930A | 2021-09-28 | |||
| JP2008224568A | 2008-09-25 | |||
| US20080174785A1 | 2008-07-24 |
Other References:
ZHANG CHUNYUE, SHUYAN XU, BOQIAN XU, XIN QI, AND GUOHAO JU: "Correction for Effect of Calibration Error on Accuracy of Co-Phasing Error Detection of Dispersed Fringe", ACTA OPTICA SINICA, vol. 38, no. 7, 1 July 2018 (2018-07-01), pages 0711003 - 0711003-8, XP093068247, DOI: 10.3788/AOS201838.0711003
SHEN, LU ET AL.: "The Recovery of the3D Surface Profile of Micro Device Through White-light Interference", JOURNAL OF FOSHAN UNIVERSITY (NATURAL SCIENCE EDITION), no. 04, 15 July 2012 (2012-07-15), pages 36 - 40, XP009546482
SHEN, LU ET AL.: "The Recovery of the3D Surface Profile of Micro Device Through White-light Interference", JOURNAL OF FOSHAN UNIVERSITY (NATURAL SCIENCE EDITION), no. 04, 15 July 2012 (2012-07-15), pages 36 - 40, XP009546482
Attorney, Agent or Firm:
CC INTELLECTUAL PROPERTY LAW FIRM (CN)
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