Title:
INVERTER MANUFACTURING METHOD AND INVERTER
Document Type and Number:
WIPO Patent Application WO/2021/056785
Kind Code:
A1
Abstract:
An inverter manufacturing method and an inverter. The inverter manufacturing method comprises the following steps: manufacturing a substrate (1), and forming a first insulating layer (2) on the substrate (1); forming a semiconductor carbon nanotube thin film on the first insulating layer (2); patterning the semiconductor carbon nanotube thin film to form a first active layer (51) and a second active layer (52) distributed at intervals; forming a first barrier layer (61) on the first active layer (51), and forming a second barrier layer (62) on the second active layer (52), wherein the first barrier layer (61) is an electrophilic film layer, and the second barrier layer (62) is an electron donating film layer; forming a first source electrode (71) and a first drain electrode (72) that are in contact with two ends of the first active layer (51) and spaced apart from each other and a second source electrode (73) and a second drain electrode (74) that are in contact with two ends of the second active layer (52) and spaced apart from each other, wherein the first drain electrode (72) is connected to the second source electrode (73). By means of using the semiconductor carbon nanotube as the active layer in cooperation with the electrophilic film layer and the electron donating film layer as the barrier layer, the manufacturing process of the inverter can be simplified, and the manufacturing cost of the inverter can be reduced.
Inventors:
XIE HUAFEI (CN)
Application Number:
PCT/CN2019/120003
Publication Date:
April 01, 2021
Filing Date:
November 21, 2019
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L21/8238; H01L27/092; H01L29/06
Foreign References:
| CN105789130A | 2016-07-20 | |||
| US20180114934A1 | 2018-04-26 | |||
| CN101136408A | 2008-03-05 | |||
| CN108630760A | 2018-10-09 | |||
| CN101150089A | 2008-03-26 |
Attorney, Agent or Firm:
COMIPS INTELLECTUAL PROPERTY OFFICE (CN)
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