Title:
ION ANALYZER
Document Type and Number:
WIPO Patent Application WO/2018/092271
Kind Code:
A1
Abstract:
This ion analyzer is provided with a sample placement part 2 on which a sample 1 is placed, an excitation beam irradiation unit 3 for irradiating an excitation beam from a direction perpendicular to the surface of the sample 1 placed on the sample placement part 2, a deflection unit 6 for causing at least some of the ions emitted from the sample 1 to travel in a direction deviating from the irradiation path of the excitation beam, and an analysis unit 8 that is disposed in the direction in which the ions deflected by the deflection unit 6 travel and separates and measures the ions according to a predetermined physical quantity.
Inventors:
KODERA KEI (JP)
HOSOI KOSUKE (JP)
SHICHI HIDEHARU (JP)
HOSOI KOSUKE (JP)
SHICHI HIDEHARU (JP)
Application Number:
PCT/JP2016/084272
Publication Date:
May 24, 2018
Filing Date:
November 18, 2016
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N27/62; H01J49/06; H01J49/10
Foreign References:
| JPH0389160A | 1991-04-15 | |||
| US20110049350A1 | 2011-03-03 | |||
| JP2013101918A | 2013-05-23 | |||
| JPH07161336A | 1995-06-23 | |||
| JP2003270208A | 2003-09-25 | |||
| JPH0945276A | 1997-02-14 | |||
| US6639217B1 | 2003-10-28 |
Other References:
See also references of EP 3543686A4
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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