Title:
ION GENERATOR, DISCHARGE UNIT FOR ION GENERATOR, AND METHOD FOR MANUFACTURING ION GENERATOR
Document Type and Number:
WIPO Patent Application WO/2023/176263
Kind Code:
A1
Abstract:
An ion generator 1 comprises: an insulation substrate 10 including a plurality of ceramic layers that are laminated in the thickness direction T; a discharge electrode 20 provided to the insulation substrate 10; and a collector electrode 30 provided at a position opposite from the discharge electrode 20 in the thickness direction T in a manner so as to partition a space with the discharge electrode 20. The plurality of ceramic layers include at least a first ceramic layer 11A and a second ceramic layer 11B that is adjacent to the first ceramic layer 11A in the thickness direction T. Provided to the insulation substrate 10 are a plurality of first through holes 12A that pass through at least the first ceramic layer 11A and the second ceramic layer 11B in the thickness direction T. The discharge electrode 20 is provided between the first ceramic layer 11A and the second ceramic layer 11B in the thickness direction T and is exposed from inner wall surfaces of the plurality of first through holes 12A.
Inventors:
YAMADA TATSUYA (JP)
KATO TOMOKI (JP)
KAWATA SHUICHI (JP)
SHIMIZU TAKASHI (JP)
KATO TOMOKI (JP)
KAWATA SHUICHI (JP)
SHIMIZU TAKASHI (JP)
Application Number:
PCT/JP2023/005222
Publication Date:
September 21, 2023
Filing Date:
February 15, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01T19/00; H01T23/00
Domestic Patent References:
| WO2013031800A1 | 2013-03-07 |
Foreign References:
| JP2010050106A | 2010-03-04 | |||
| JP2004349192A | 2004-12-09 | |||
| JP2009245646A | 2009-10-22 | |||
| JPH08137212A | 1996-05-31 |
Attorney, Agent or Firm:
WISEPLUS IP FIRM (JP)
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