ION GUN AND VACUUM PROCESSING EQUIPMENT

Title:

ION GUN AND VACUUM PROCESSING EQUIPMENT

Document Type and Number:

WIPO Patent Application WO/2022/019130

Kind Code:

A1

Abstract:

An ion gun has an anode, a cathode having first and second portions facing the anode, and a magnet forming a spatial magnetic field between the first and second portions. An annular gap including a curved portion is provided between the first portion and the second portion of the cathode. The magnet forms magnetic field lines having a bottom on the inside of the cross-sectional center line of the gap between the first portion and the second portion of the curved portion.

More Like This:

WO/2003/036678	ION IMPLANTATION SYSTEMS AND METHODS UTILIZING A DOWNSTREAM GAS SOURCE
WO/2007/149727	METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
JPS63216249	GAS PHASE ION SOURCE

Inventors:

HIROISHI TSUTOMU (JP)
SAKAMOTO REIJI (JP)
YAKUSHIJI HIROSHI (JP)

Application Number:

PCT/JP2021/025743

Publication Date:

January 27, 2022

Filing Date:

July 08, 2021

Export Citation:

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Assignee:

CANON ANELVA CORP (JP)

International Classes:

H01J37/08; H01J27/14

Domestic Patent References:

WO2019182111A1

2019-09-26

Foreign References:

US20120187843A1	2012-07-26
CN109065429A	2018-12-21
US5763989A	1998-06-09
JP2008053116A	2008-03-06

Attorney, Agent or Firm:

OKABE, Yuzuru et al. (JP)

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