Title:
ION MILLING DEVICE AND METHOD FOR PROCESSING SPECIMEN
Document Type and Number:
WIPO Patent Application WO/2024/053074
Kind Code:
A1
Abstract:
This ion milling device comprises: a specimen stage (103) on which a specimen is to be placed; a specimen table (102) and a shielding-plate-fixing part (106) which are supported by the specimen stage; a shielding plate (105) fixed to the shielding-plate-fixing part; an ion source (101) which emits an unfocused ion beam toward the specimen; and a temperature regulation unit (108) which is connected to the shielding-plate-fixing part by a heat transfer cable (107) and which regulates the temperature of the shielding-plate-fixing part. The specimen is sandwiched between the shielding plate and the specimen table and held thereby, and the amount in which the specimen protrudes from the shielding plate is regulated in accordance with temperatures of the shielding-plate-fixing part which are set by the temperature regulation unit.
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Inventors:
HORINOUCHI KENTO (JP)
AIDA SHOTA (JP)
AIDA SHOTA (JP)
Application Number:
PCT/JP2022/033810
Publication Date:
March 14, 2024
Filing Date:
September 08, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20; H01J37/30; H01J37/305
Domestic Patent References:
| WO2014199737A1 | 2014-12-18 |
Foreign References:
| JP2010257856A | 2010-11-11 | |||
| JP2016095895A | 2016-05-26 | |||
| JP2010169459A | 2010-08-05 | |||
| JP2012154846A | 2012-08-16 | |||
| JP2016173874A | 2016-09-29 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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