Title:
IONIC LIQUID AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2023/021895
Kind Code:
A1
Abstract:
Provided is an ionic liquid that can be used for semiconductor manufacturing and that has a low metal ion content. This ionic liquid comprises cations and anions and contains, each by not more than 100 ppb, metal ions of 16 elements indicated by the following element symbols: Li, Na, Ca, Mg, Al, K, Ti, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ba, and W.
Inventors:
MASUDA GEN (JP)
OCHIKUBO TATSUYA (JP)
OCHIKUBO TATSUYA (JP)
Application Number:
PCT/JP2022/027664
Publication Date:
February 23, 2023
Filing Date:
July 14, 2022
Export Citation:
Assignee:
NISSHINBO HOLDINGS INC (JP)
International Classes:
C07C53/10; C07C309/06; C07C311/02; C07D207/04; C07D233/58; C07D487/04; C07F7/08; C07F9/30; C07F9/54
Domestic Patent References:
| WO2020217911A1 | 2020-10-29 |
Foreign References:
| KR20190055431A | 2019-05-23 | |||
| JP2006286257A | 2006-10-19 | |||
| US3366663A | 1968-01-30 | |||
| JP2011184421A | 2011-09-22 | |||
| JP2019139992A | 2019-08-22 |
Other References:
STOLTE STEFAN, STEUDTE STEPHANIE, AREITIOAURTENA OLATZ, PAGANO FRANCESCO, THÖMING JORG, STEPNOWSKI PIOTR, IGARTUA AMAYA: "Ionic liquids as lubricants or lubrication additives: An ecotoxicity and biodegradability assessment", CHEMOSPHERE, PERGAMON PRESS, OXFORD., GB, vol. 89, no. 9, 1 November 2012 (2012-11-01), GB , pages 1135 - 1141, XP093036380, ISSN: 0045-6535, DOI: 10.1016/j.chemosphere.2012.05.102
Attorney, Agent or Firm:
PATENT PROFESSIONAL CORPORATION EI-MEI PATENT OFFICE (JP)
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