Title:
ISOLATION DEVICE WITH BUILT-IN PARTICLE COUNTER
Document Type and Number:
WIPO Patent Application WO/2018/047409
Kind Code:
A1
Abstract:
The present invention accurately manages the number of fine particles in a workspace and prevents fine particles from mixing with an experimental material. An isolation device for supplying a workspace with clean air resulting from dust filtration by an air cleaning means, said isolation device being provided with: a measurement probe that is for air intake and is disposed in the workspace; a particle counter for measuring the fine-particle counts for a plurality of particle sizes in the workspace air taken in by the measurement probe and outputting the measurements; a storage unit for storing, for each of the plurality of particle sizes and for work times and non-work times, management fine-particle counts at which the number of fine particles per unit volume is determined to be large; a cleanliness determination unit for determining cleanliness by comparing the fine particle counts for the plurality of particle sizes measured by the particle counter and the management fine-particle counts for the plurality of particle sizes stored by the storage unit; and an output unit for outputting an alarm if the cleanliness determination unit determines that the work-time/non-work time fine particle count for a particle size in the workspace during operation exceeds the corresponding management fine-particle count.
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Inventors:
ONO KEIICHI (JP)
SUZUKI TOMOYUKI (JP)
SUZUKI TOMOYUKI (JP)
Application Number:
PCT/JP2017/017979
Publication Date:
March 15, 2018
Filing Date:
May 12, 2017
Export Citation:
Assignee:
HITACHI INDUSTRY EQUIPMENT SYSTEMS CO LTD (JP)
International Classes:
G01N15/06; B01L1/00
Domestic Patent References:
| WO2016079777A1 | 2016-05-26 | |||
| WO2008139777A1 | 2008-11-20 |
Foreign References:
| JP2005279575A | 2005-10-13 | |||
| JP2016008933A | 2016-01-18 | |||
| JP2016105043A | 2016-06-09 | |||
| JP2001058114A | 2001-03-06 | |||
| JP2015121515A | 2015-07-02 | |||
| JP2000093815A | 2000-04-04 |
Attorney, Agent or Firm:
SEIRYO I.P.C. (JP)
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