Title:
JIG AND POSITIONING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/038832
Kind Code:
A1
Abstract:
Provided are: a positioning jig that is used in positioning a ring member when the ring member is transported within a plasma treatment chamber and installed; and a positioning method. This jig is used when a ring member is installed on a ring support surface of an installation-receiving member, the jig comprising a base plate and a sheet member that has a fixed part fixed to the base plate and a protruding part protruding from a side surface of the base plate.
Inventors:
AKAMA TOSHIKI (JP)
SASAKI NOBUTAKA (JP)
SASAKI NOBUTAKA (JP)
Application Number:
PCT/JP2023/029305
Publication Date:
February 22, 2024
Filing Date:
August 10, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/68; H01L21/3065; H01L21/683; H05H1/46
Foreign References:
| US20040126924A1 | 2004-07-01 | |||
| JP2007200965A | 2007-08-09 | |||
| JP2020077654A | 2020-05-21 | |||
| JP2020136622A | 2020-08-31 | |||
| JP2011054933A | 2011-03-17 | |||
| JP2022536683A | 2022-08-18 | |||
| US20020166762A1 | 2002-11-14 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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