Title:
LITHIUM PRECURSORS FOR LixMyOz MATERIALS FOR BATTERIES
Document Type and Number:
WIPO Patent Application WO/2011/002920
Kind Code:
A3
Abstract:
Disclosed are lithium-containing compounds and methods of utilizing the same. The disclosed compounds may be used to deposit alkali metal-containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition. In certain embodiments, the lithium-containing compounds include a ligand and at least one aliphatic group as substituents selected to have greater degrees of freedom than the usual substituent.
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Inventors:
PALLEM VENKATESWARA R (US)
DUSSARRAT CHRISTIAN (US)
DUSSARRAT CHRISTIAN (US)
Application Number:
PCT/US2010/040655
Publication Date:
April 28, 2011
Filing Date:
June 30, 2010
Export Citation:
Assignee:
AIR LIQUIDE (FR)
PALLEM VENKATESWARA R (US)
DUSSARRAT CHRISTIAN (US)
PALLEM VENKATESWARA R (US)
DUSSARRAT CHRISTIAN (US)
International Classes:
C07F1/02; C23C16/40; C23C16/455
Domestic Patent References:
| WO2009084966A1 | 2009-07-09 |
Foreign References:
| US3911176A | 1975-10-07 | |||
| EP2055804A1 | 2009-05-06 | |||
| US3071493A | 1963-01-01 |
Other References:
BROOMHALL-DILLARD R N R ET AL: "Volatile liquid precursors for the chemical vapor deposition (CVD) of thin films containing alkali metals", CHEMICAL PROCESSING OF DIELECTRICS, INSULATORS AND ELECTRONIC CERAMICS. SYMPOSIUM (MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOL.606) MATER. RES. SOC WARRENDALE, PA, USA, 2000, pages 139 - 145, XP002606759, ISBN: 1-55899-514-5
YOSHIKAWA A ET AL: "Photoluminescence properties of Li-doped ZnSe films grown by metalorganic chemical vapor deposition", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 2 (LETTERS) JAPAN, vol. 27, no. 2, February 1988 (1988-02-01), pages L260 - L262, XP002606760, ISSN: 0021-4922
ERKER G ET AL: "Functionalized alkali metal cyclopentadienides: Structural and chemical features", ORGANOMETALLICS 20080114 AMERICAN CHEMICAL SOCIETY US, vol. 27, no. 1, 14 January 2008 (2008-01-14), pages 3 - 14, XP002606761, DOI: DOI:10.1021/OM7007666
PUTKONEN M ET AL: "Atomic layer deposition of lithium containing thin films", JOURNAL OF MATERIALS CHEMISTRY 2009 ROYAL SOCIETY OF CHEMISTRY GBR, vol. 19, no. 46, 2009, pages 8767 - 8771, XP002606762, DOI: DOI:10.1039/B913466B
YOSHIKAWA A ET AL: "Photoluminescence properties of Li-doped ZnSe films grown by metalorganic chemical vapor deposition", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 2 (LETTERS) JAPAN, vol. 27, no. 2, February 1988 (1988-02-01), pages L260 - L262, XP002606760, ISSN: 0021-4922
ERKER G ET AL: "Functionalized alkali metal cyclopentadienides: Structural and chemical features", ORGANOMETALLICS 20080114 AMERICAN CHEMICAL SOCIETY US, vol. 27, no. 1, 14 January 2008 (2008-01-14), pages 3 - 14, XP002606761, DOI: DOI:10.1021/OM7007666
PUTKONEN M ET AL: "Atomic layer deposition of lithium containing thin films", JOURNAL OF MATERIALS CHEMISTRY 2009 ROYAL SOCIETY OF CHEMISTRY GBR, vol. 19, no. 46, 2009, pages 8767 - 8771, XP002606762, DOI: DOI:10.1039/B913466B
Attorney, Agent or Firm:
MCQUEENEY, Patricia E. et al. (2700 Post Oak Blvd.Suite 180, Houston Texas, US)
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