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Title:
LAMINATE BODY
Document Type and Number:
WIPO Patent Application WO/2015/025949
Kind Code:
A1
Abstract:
　The present invention provides a laminate body capable of forming an excellent pattern on an organic semiconductor. A laminate body having, on the surface of an organic semiconductor film, at least a water-soluble resin film and a resist film comprising a chemically amplified photosensitive resin composition in the stated order, wherein the chemically amplified photosensitive resin composition contains a photoacid generator which is dissolved 80 mol% or more when exposed to light 365 nm in wavelength at a rate of 100 mJ/cm 2 or more, allowing a mask pattern to be formed as the exposed part becomes insoluble in a developing agent containing an organic solvent, the mask pattern after formation being used as an etching mask.

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Inventors:
KAMOCHI YOSHITAKA (JP)
KOYAMA ICHIRO (JP)
IWAI YU (JP)
NAKAMURA ATSUSHI (JP)
Application Number:
PCT/JP2014/071977
Publication Date:
February 26, 2015
Filing Date:
August 22, 2014
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/095; G03F7/004; G03F7/038; G03F7/039; G03F7/11
Foreign References:
JP2014098889A2014-05-29
JP2006058497A2006-03-02
JP2006041317A2006-02-09
JP2004266197A2004-09-24
JP2014133727A2014-07-24
JP2010283240A2010-12-16
JP2008085200A2008-04-10
JP2013050511A2013-03-14
JP2006041317A2006-02-09
JP2004266197A2004-09-24
JP2008197480A2008-08-28
JP2012159830A2012-08-23
JP2011209692A2011-10-20
JP2004264623A2004-09-24
JPS6236663A1987-02-17
JPS61226746A1986-10-08
JPS61226745A1986-10-08
JPS62170950A1987-07-28
JPS6334540A1988-02-15
JPH07230165A1995-08-29
JPH0862834A1996-03-08
JPH0954432A1997-02-25
JPH095988A1997-01-10
JP2001330953A2001-11-30
JPS59126506A1984-07-21
JPS5946628A1984-03-16
JPS5746628A1982-03-17
JPS589108A1983-01-19
JPS582809A1983-01-08
JPS57148706A1982-09-14
JPS6141102A1986-02-27
JP2005331918A2005-12-02
Other References:
See also references of EP 3037880A4
Attorney, Agent or Firm:
SIKs & Co. (JP)
Patent business corporation patent firm Sykes (JP)
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