Title:
LAMINATED COATING LAYER, METHOD FOR MANUFACTURING SAME, AND METHOD FOR DETERMINING LAMINATED STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2020/129878
Kind Code:
A1
Abstract:
Provided is a laminated coating layer that is a coating layer containing a metal oxide film formed on a processing-target object in the form of a low-temperature-atomic-layer-deposition film, wherein: the coating layer is provided with at least one set of at least two layers among an adhesion layer 2, a moisture-proof layer 3, and a water-proof layer 4 on a surface of a processing-target object 1; the adhesion layer is formed of at least one type of film selected from a metal oxide film and a resin film; the moisture-proof layer is a film in which the principal component is alumina; and the water-proof layer is formed of at least one type of film among a resin film and a metal oxide film selected from a silica film, a niobium oxide film, and a zirconium oxide film.
Inventors:
HIROSE FUMIHIKO (JP)
MIURA MASANORI (JP)
KANOMATA KENSAKU (JP)
KUBOTA SHIGERU (JP)
YOSHIDA KAZUKI (JP)
MIURA MASANORI (JP)
KANOMATA KENSAKU (JP)
KUBOTA SHIGERU (JP)
YOSHIDA KAZUKI (JP)
Application Number:
PCT/JP2019/049106
Publication Date:
June 25, 2020
Filing Date:
December 16, 2019
Export Citation:
Assignee:
UNIV YAMAGATA (JP)
International Classes:
C23C16/40; C23C16/42; C23C28/00; C23C28/04; G01B11/06
Domestic Patent References:
| WO2011111586A1 | 2011-09-15 | |||
| WO2017057775A1 | 2017-04-06 |
Foreign References:
| JP2011018707A | 2011-01-27 | |||
| JP2015166170A | 2015-09-24 | |||
| JP2018506859A | 2018-03-08 |
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
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