LARGE LINEAR PLASMA SOURCE, LARGE LINEAR CHARGED PARTICLE BEAM SOURCE USING SAME, AND GRID FOR LARGE LINEAR CHARGED PARTICLE BEAM SOURCE

WIPO Patent Application WO/2023/191324

A1

The present invention relates to a large linear TCP plasma source, a large linear charged particle beam source using same, and a grid for the large linear charged particle beam source. The large linear charged particle beam source comprises: a large linear TCP plasma source that is formed by mounting at least two unit TCP plasma sources inside a plasma vacuum chamber; a beam body that is disposed in front of the large linear TCP plasma source and configured to confine the plasma generated from the large linear TCP plasma source; a beam grid that has a plurality of grid holes and is disposed at an exit of the beam body and extracts charged particles from the plasma inside the beam body; and an acceleration grid that has a plurality of grid holes, is spaced a certain distance from the beam grid, and accelerates the charged particles extracted from the beam grid. The beam grid, the acceleration grid, and a deceleration grid are formed by sequentially connecting the plurality of unit grid modules, and the lateral connection structure of the unit grid modules is one of a stair type, a slope type, or a combined slope-stair type. This structure makes it possible to uniformly emit a charged particle beam over a large area.

JP5380263

Ion beam generator

KIM YONG HWAN (KR)

PCT/KR2023/002928

October 05, 2023

March 03, 2023

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INFOVION INC (KR)

H01J27/02; H01J37/08; H01J37/32

KR100813090B1	2008-03-17
KR102045058B1	2019-11-15
US20030193294A1	2003-10-16
KR20160026770A	2016-03-09
KR102204217B1	2021-01-19

LEE, Ji Yeon (KR)

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