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Title:
LASER ABLATION DEVICE AND ANALYSIS APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/202689
Kind Code:
A1
Abstract:
A laser ablation device (21) is provided with: a laser light source (22) that outputs a femtosecond pulse laser beam (22a); an optical system (23) that includes a first mirror (24) rotatable about a first axis (24a), a second mirror (25) rotatable about a second axis (25a), a first driving source (24b) for rotating the first mirror (24) about the first axis (24a), and a second driving source (25b) for rotating the second mirror (25) about the second axis (25a), and that reflects the laser beam from the laser light source (22) toward a sample (S) by means of the first mirror (24) and the second mirror (25); and an irradiation control means (C3) that, on the basis of the two-dimensional coordinate position of an analysis position, controls the first driving source (24b) and the second driving source (25b) to irradiate the analysis position with the laser beam (22a). Thus, a position in which a sample is set or a position in which analysis can be performed is made wider than that in a conventional configuration.

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Inventors:
NAKAGAWA TAKAO (JP)
YASUDA NORIO (JP)
Application Number:
PCT/JP2018/016026
Publication Date:
October 24, 2019
Filing Date:
April 18, 2018
Export Citation:
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Assignee:
S T JAPAN INC (JP)
International Classes:
G01N1/28; G01N21/63; G01N21/71; G01N27/62
Foreign References:
JP2016522887A2016-08-04
JP2014071160A2014-04-21
JPH11103150A1999-04-13
JP2017193060A2017-10-26
JP2003247920A2003-09-05
JPH05119244A1993-05-18
JPH0772047A1995-03-17
JP2015504161A2015-02-05
JP2016517523A2016-06-16
JP2013130492A2013-07-04
Other References:
"Direct Determination of Trace Elements in Powdered Samples by In-Cell Isotope Dilution Femtosecond Laser Ablation ICP MS", ANAL. CHEM., vol. 80, 2008, pages 6981 - 6994
See also references of EP 3779399A4
Attorney, Agent or Firm:
KAMEI Takeyuki (JP)
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