Title:
LASER AMPLIFICATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/186508
Kind Code:
A1
Abstract:
The present invention is provided with a laser oscillator (20) that has a first laser active medium having mixed gas containing carbon dioxide gas and that oscillates a pulsed laser beam with a full width at half maximum of 15-200 ns; and a laser amplifier (30) that has a second laser active medium having mixed gas containing carbon dioxide gas and in which the pulsed laser beam oscillated from the laser oscillator (20) is shortened to a pulsed laser beam with a full width at half maximum of 5-30 ns as a result of passing through the second laser active medium and the shortened pulsed laser beam is output.
Inventors:
TADOKORO YUZURU (JP)
YAMAMOTO TATSUYA (JP)
NISHIMAE JUNICHI (JP)
YAMAMOTO TATSUYA (JP)
NISHIMAE JUNICHI (JP)
Application Number:
PCT/JP2020/011525
Publication Date:
September 23, 2021
Filing Date:
March 16, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01S3/23; G03F7/20; H01S3/10; H01S3/223
Foreign References:
| JP2012216769A | 2012-11-08 | |||
| JP2006128157A | 2006-05-18 | |||
| JP2006505960A | 2006-02-16 |
Attorney, Agent or Firm:
TAKAMURA, Jun (JP)
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