Title:
LASER APPARATUS, PHOTOTHERAPEUTIC APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD AND APPARATUS FOR INSPECTING SUBJECT TO BE INSPECTED
Document Type and Number:
WIPO Patent Application WO/2010/023841
Kind Code:
A1
Abstract:
Possibilities of generating fiber fusion are further reduced. A laser apparatus (1) has an excitation light source, and a light amplifying section which amplifies light by receiving excitation light outputted from the excitation light source through optical fibers (4A, 4B, 4C). A monitor section monitors the power level of excitation light transmitted to the light amplifying section from the excitation light source through the optical fibers (4A, 4B, 4C). In the case where the power level monitored by the monitor section is higher than a predetermined value when excitation light at the predetermined power level is being outputted from the excitation light source after making the excitation light source output excitation light at the predetermined power level when the excitation light source started outputting excitation light, a control section controls the excitation light source to output excitation light at a power level higher than the predetermined power level. In the case where the power level monitored by the monitor section is the prescribed value or lower when excitation light at the predetermined power level is being outputted from the excitation light source, the control section controls to stop excitation light output.
Inventors:
TAKADA YASUTOSHI (JP)
TOKUHISA AKIRA (JP)
TOKUHISA AKIRA (JP)
Application Number:
PCT/JP2009/003916
Publication Date:
March 04, 2010
Filing Date:
August 18, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
TAKADA YASUTOSHI (JP)
TOKUHISA AKIRA (JP)
TAKADA YASUTOSHI (JP)
TOKUHISA AKIRA (JP)
International Classes:
H01S3/10; A61B18/20; A61F9/007; G03F7/20; H01L21/027
Domestic Patent References:
| WO2004054050A1 | 2004-06-24 |
Foreign References:
| JP2003318472A | 2003-11-07 | |||
| JPH11312848A | 1999-11-09 |
Attorney, Agent or Firm:
OHNISHI, Shogo (JP)
Shogo Onishi (JP)
Shogo Onishi (JP)
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