Title:
LASER CHAMBER AND DISCHARGE-EXCITED GAS LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/069636
Kind Code:
A1
Abstract:
The purpose of the present invention is to minimize fluorine gas-induced corrosion of a touchdown bearing used in a laser chamber, as well as to minimize wear of the touchdown bearing. The laser chamber houses a pair of discharge electrodes and a fan for gas circulation, and is provided with a magnetic bearing capable of contactless support of the shaft of the fan, and a touchdown bearing that functions as a bearing at times when the magnetic bearing is out of control. As a solid lubricant for the touchdown bearing, there may be employed at least one of an Au plating layer, an Ni-containing plating layer, and a Cu plating layer.
Inventors:
TSUSHIMA HIROAKI (JP)
MIZOGUCHI HAKARU (JP)
FUJIMOTO JUNICHI (JP)
NAKARAI HIROAKI (JP)
MIZOGUCHI HAKARU (JP)
FUJIMOTO JUNICHI (JP)
NAKARAI HIROAKI (JP)
Application Number:
PCT/JP2013/079751
Publication Date:
May 08, 2014
Filing Date:
November 01, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/036; F16C19/06; F16C32/04; F16C33/66; H01S3/134
Domestic Patent References:
| WO2000033431A1 | 2000-06-08 |
Foreign References:
| JP2000183436A | 2000-06-30 | |||
| JPH06275902A | 1994-09-30 | |||
| JPH10103362A | 1998-04-21 | |||
| JP2012059797A | 2012-03-22 | |||
| JP2003013622A | 2003-01-15 | |||
| JP2001044533A | 2001-02-16 | |||
| JPH10270779A | 1998-10-09 | |||
| JPH08303453A | 1996-11-19 | |||
| JPH04155877A | 1992-05-28 | |||
| JPH0572158U | 1993-09-28 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Tadashige Ito (JP)
Tadashige Ito (JP)
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