Title:
LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/067343
Kind Code:
A1
Abstract:
The purpose of the present invention is to output laser light having desired characteristics at a desired timing. This laser device is a laser device to be used in tandem with an extreme ultraviolet light generation device that generates extreme ultraviolet light at a repetition frequency set in advance. The laser device may be provided with: semiconductor lasers that output laser light upon input of a trigger signal; optical switches that are disposed on the light path of the laser light and toggle between allowing the laser light to pass and not allowing the laser light to pass; and a control unit that outputs the trigger signal to the semiconductor lasers at a frequency that is an integer multiple of the repetition frequency and controls the optical switches such that the laser light passes at the repetition frequency.
Inventors:
NOGIWA SEIJI (JP)
Application Number:
PCT/JP2014/078522
Publication Date:
May 06, 2016
Filing Date:
October 27, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01L21/027; H01S5/06; H01S5/12; H05G2/00
Domestic Patent References:
| WO2013161760A1 | 2013-10-31 |
Foreign References:
| JP2013065804A | 2013-04-11 | |||
| JP2013093308A | 2013-05-16 | |||
| JP2012182434A | 2012-09-20 | |||
| JP2010226096A | 2010-10-07 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)
Patent business corporation エビス international patent firm (JP)
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