Title:
LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/192132
Kind Code:
A1
Abstract:
A laser device according to an aspect of the present disclosure comprises: a master oscillator that outputs laser light; an amplifier that has an optical resonator and amplifies the laser light output from the master oscillator inside the optical resonator; and a phase shift structure disposed on a side closer to the amplifier side than an intermediate point on a light path between the master oscillator and the amplifier. The phase shift structure is provided with a plurality of cells each having different phase shift amounts of the laser light, wherein the disposition intervals of the cells are 80-275 μm inclusive.
Inventors:
TAMARU YUKI (JP)
MIURA TAISUKE (JP)
MIURA TAISUKE (JP)
Application Number:
PCT/JP2020/013579
Publication Date:
September 30, 2021
Filing Date:
March 26, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2018138819A1 | 2018-08-02 |
Foreign References:
| JP2011192849A | 2011-09-29 | |||
| JP2012156531A | 2012-08-16 | |||
| JP2012204819A | 2012-10-22 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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