Title:
LASER DEVICE, PULSE WIDTH EXPANDING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/240682
Kind Code:
A1
Abstract:
This laser device comprises: a laser oscillator that outputs a pulse laser beam; and a first optical pulse stretcher, a second optical pulse stretcher and a third optical pulse stretcher which are disposed on an optical path of the pulse laser beam. When L1 represents the length of a delay optical path of the first optical pulse stretcher, L2 represents the length of a delay optical path of the second optical pulse stretcher, L3 represents the length of a delay optical path of the third optical pulse stretcher, and n represents an integer of 2 or larger, L2 is equal to an integer multiple of at least 2 of L1, and L3 satisfies the formula: (n - 0.75) × L1 ≤ L3 ≤ (n - 0.25) × L1.
Inventors:
MIYAMOTO HIROTAKA (JP)
Application Number:
PCT/JP2020/020890
Publication Date:
December 02, 2021
Filing Date:
May 27, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01S3/10
Domestic Patent References:
| WO2018047220A1 | 2018-03-15 | |||
| WO2014003018A1 | 2014-01-03 | |||
| WO2018020564A1 | 2018-02-01 |
Foreign References:
| JP2009514246A | 2009-04-02 | |||
| JP2009246345A | 2009-10-22 | |||
| US20060216037A1 | 2006-09-28 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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