Title:
LASER IRRADIATION DEVICE, INFORMATION PROCESSING METHOD, PROGRAM, AND METHOD FOR GENERATING TRAINED MODEL
Document Type and Number:
WIPO Patent Application WO/2023/013145
Kind Code:
A1
Abstract:
This laser irradiation device comprises a laser light source for emitting laser light, and a control unit for performing control relating to irradiation of a substrate with the laser light, wherein the control unit: acquires an operation parameter that includes a detection value from a detection unit provided to the laser irradiation device; inputs the acquired operation parameter to a trained model for outputting predicted quality information pertaining to a product that includes the substrate irradiated with the laser light when the operation parameter is inputted, thereby calculating the predicted quality information; and outputs the calculated predicted quality information and the acquired operation parameter in association with one another.
Inventors:
OHMORI KENICHI (JP)
OHTA YUZABURO (JP)
MATSUSHITA REI (JP)
OHTA YUZABURO (JP)
MATSUSHITA REI (JP)
Application Number:
PCT/JP2022/012980
Publication Date:
February 09, 2023
Filing Date:
March 22, 2022
Export Citation:
Assignee:
JSW AKTINA SYSTEM CO LTD (JP)
International Classes:
B23K26/00; B23K26/073; H01L21/02; H01L21/20; H01L21/268; H01S3/00; H01S3/10
Domestic Patent References:
| WO2013030885A1 | 2013-03-07 |
Foreign References:
| JP2012119512A | 2012-06-21 | |||
| JP2015152933A | 2015-08-24 | |||
| JP2017164801A | 2017-09-21 | |||
| JP2009065146A | 2009-03-26 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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