Title:
LASER IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/125141
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a laser irradiation device with which it is possible to form detailed images while scanning laser light. In this laser irradiation device, the intensity distribution of laser light is uniformized and is molded by a slit (12a), the laser light that has passed through the slit (12a) is formed into parallel light by a first optical member (15), the laser light is caused to form an image on an intermediate image surface (20) by a second optical member (17), and the laser light is scanned over the intermediate image surface (20) by using scan mirrors (16a, 16b). In addition, a reducing optical system (14) reduces a slit image formed on the intermediate image surface (20) to form an image on a machining surface of a workpiece (100).
Inventors:
SHIMOURA ATSUSHI (JP)
SUZUKI YOSHIKAZU (JP)
SUZUKI YOSHIKAZU (JP)
Application Number:
PCT/JP2020/046595
Publication Date:
June 24, 2021
Filing Date:
December 14, 2020
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G02B26/10; B23K26/066; B23K26/073; B23K26/082
Foreign References:
| US4176925A | 1979-12-04 | |||
| JPH05237676A | 1993-09-17 | |||
| US20120267345A1 | 2012-10-25 |
Attorney, Agent or Firm:
SAKATA Yukari (JP)
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