Title:
LASER LIGHT RADIATION DEVICE AND LASER LIGHT RADIATION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/154791
Kind Code:
A1
Abstract:
A laser light radiation device, provided with: a laser light source for generating laser light; a spatial light modulator having a display unit for displaying a phase pattern; an objective lens for condensing the laser light emitted by the spatial light modulator onto an object; an image transfer optical system for transferring an image of the laser light on the display unit onto an entrance pupil surface of the objective lens; a reflection light detector for detecting the reflection light of the laser light incident on the object and reflected by an opposite surface on the opposite side from the laser light incident surface; and a control unit for controlling the phase pattern to be displayed on the display unit. When the reflection light is detected by the reflection light detector, the control unit causes the display unit to display a reflection light aberration-correcting pattern, which is a phase pattern for correcting an aberration that occurs when the laser light is transmitted through an object having twice the thickness of a predetermined thickness.
Inventors:
IGASAKI YASUNORI (JP)
NAKAGAWA AIKO (JP)
NAKAGAWA AIKO (JP)
Application Number:
PCT/JP2017/008578
Publication Date:
September 14, 2017
Filing Date:
March 03, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
B23K26/00; B23K26/035; B23K26/064; G02F1/13
Domestic Patent References:
| WO2013153371A1 | 2013-10-17 |
Foreign References:
| JP2015226012A | 2015-12-14 | |||
| JP2011051011A | 2011-03-17 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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