Title:
LASER LIGHT SOURCE DEVICE AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/155777
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a laser light source device that uses a high-power laser and has a long life and reduced speckle noise. The present invention is a laser light source device (1) that emits laser light and comprises: a light beam branching section (3) that branches a light beam (L0) emitted from a laser light source unit (2) into a first branching light beam (L1) and a second branching light beam (L2); and a light beam combining unit (5) that combines the first branching light beam (L1) and the second branching light beam (L2). The optical path length of the second branching light beam (L2) is set longer than the optical path length of the first branching light beam (L1), and diffusing plates (41, 42, 43) are provided in the optical paths of the first branching light beam (L1) and the second branching light beam (L2).
Inventors:
MURATA HIROYUKI (JP)
OKUBO KENJI (JP)
ISHIKAWA NAOMICHI (JP)
OKUBO KENJI (JP)
ISHIKAWA NAOMICHI (JP)
Application Number:
PCT/JP2018/047820
Publication Date:
August 15, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
G02B27/48; G01N21/956; H01L21/66; H01S3/10; G03B21/14
Domestic Patent References:
| WO2009028438A1 | 2009-03-05 |
Foreign References:
| JP2013222058A | 2013-10-28 | |||
| JP2011100093A | 2011-05-19 | |||
| JP2011107144A | 2011-06-02 | |||
| JP2015072241A | 2015-04-16 | |||
| JP2012137608A | 2012-07-19 | |||
| JP2000193443A | 2000-07-14 | |||
| US20090213350A1 | 2009-08-27 | |||
| JP2018097142A | 2018-06-21 |
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