Title:
LASER PROCESSING APPARATUS AND METHOD USING LASER BEAMS OF DIFFERENT WAVELENGTHS
Document Type and Number:
WIPO Patent Application WO/2021/118327
Kind Code:
A3
Abstract:
Disclosed are a laser processing apparatus and method using laser beams of different wavelengths. According to an embodiment of the present invention, the laser processing apparatus comprises: a first laser oscillator for outputting a first laser beam; a second laser oscillator for outputting a second laser beam; a first beam transmission system for transmitting the first laser beam to a beam combining unit; a second beam transmission system for transmitting the second laser beam to the beam combining unit; the beam combining unit including a first optical system which transmits the first laser beam and reflects the second laser beam, and combines the transmitted first laser beam and the reflected second laser beam to first-transmit the combined beam along an identical path; a beam shape design unit for designing the shapes of the first laser beam and the second laser beam that have been transmitted along the identical path, and second-transmitting each of the designed first laser beam and second laser beam; a polygon mirror for irradiating the first laser beam and the second laser beam onto an object to be processed by scanning the second-transmitted first laser beam and second laser beam while rotating at a certain speed; and a controller for controlling the inclination angle of the beam combining unit to determine the irradiation positions of the irradiated first laser beam and the irradiated second laser beam on the object to be processed.
Inventors:
PARK YONG WON (KR)
SHIN HEE WON (KR)
SHIN HEE WON (KR)
Application Number:
PCT/KR2020/018278
Publication Date:
July 29, 2021
Filing Date:
December 14, 2020
Export Citation:
Assignee:
DUWONPHOTONICS CO LTD (KR)
International Classes:
H01S3/23; B23K26/06
Foreign References:
| KR101509549B1 | 2015-04-06 | |||
| KR102046015B1 | 2019-11-18 | |||
| US20180178320A1 | 2018-06-28 | |||
| KR20180125470A | 2018-11-23 | |||
| JP2002210578A | 2002-07-30 |
Attorney, Agent or Firm:
KIM, Dae Young et al. (KR)
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