Title:
LASER PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/213205
Kind Code:
A1
Abstract:
The present invention improves the quality of a crystalline film. This laser processing apparatus comprises a movable member (700A) disposed in the vicinity of a stage (1) having an upper surface over which a substrate (2) is moveable. The movable member (700A) is disposed so as to overlap, in a plan view, a local gas seal portion (505A) for spraying gas from an opening portion (OP) toward the substrate (2).
Inventors:
SHIMIZU RYO (JP)
MATSUSHIMA TATSURO (JP)
ITO DAISUKE (JP)
MATSUSHIMA TATSURO (JP)
ITO DAISUKE (JP)
Application Number:
PCT/JP2019/046884
Publication Date:
October 22, 2020
Filing Date:
November 29, 2019
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
H01L21/268
Foreign References:
| JP2008244195A | 2008-10-09 | |||
| JP2003173968A | 2003-06-20 | |||
| JP2002118076A | 2002-04-19 | |||
| JP2004087962A | 2004-03-18 | |||
| JP2000349041A | 2000-12-15 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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