Title:
LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2012/173008
Kind Code:
A1
Abstract:
An objective of the present invention is to allow projecting a visible light laser beam and a near-infrared laser beam on a body to be processed such as a wafer with an inexpensive device configuration with a high degree of controllability, and to allow laser processing the body to be processed with a high degree of productivity. A laser beam processing device comprises: a visible light laser light source (G1) which outputs a visible light laser beam; a visible light optical assembly (GS (an optical fiber (G2) and a collimator lens (G3)) which wave guides the visible light laser beam; a near-infrared laser light source (R1) which outputs a near-infrared laser beam; a near-infrared optical assembly (RS (an optical fiber (R2), a light collection lens (R3), an optical fiber (R4), and a collimator lens (R5)) which wave guides the near-infrared laser beam; and a multiplexing optical assembly (MS (a dichroic mirror (M1), a galvano mirror (M2), and an fθ lens (M3)), which multiplexes the visible light laser beam which is wave guided by the visible light optical assembly (GS) and the near-infrared laser beam which is wave guided by the near-infrared optical assembly (RS) and wave guides same to a body to be processed (1).
Inventors:
KOBAYASHI NAOYUKI (JP)
YAMAGUCHI YOSHIHIRO (JP)
SEINO TOSHIAKI (JP)
KUDO TOSHIO (JP)
YAMAGUCHI YOSHIHIRO (JP)
SEINO TOSHIAKI (JP)
KUDO TOSHIO (JP)
Application Number:
PCT/JP2012/064376
Publication Date:
December 20, 2012
Filing Date:
June 04, 2012
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
KOBAYASHI NAOYUKI (JP)
YAMAGUCHI YOSHIHIRO (JP)
SEINO TOSHIAKI (JP)
KUDO TOSHIO (JP)
KOBAYASHI NAOYUKI (JP)
YAMAGUCHI YOSHIHIRO (JP)
SEINO TOSHIAKI (JP)
KUDO TOSHIO (JP)
International Classes:
H01L21/268; B23K26/00; B23K26/06; B23K26/073; B23K26/08; H01L21/20; H01L21/265
Domestic Patent References:
| WO2007015388A1 | 2007-02-08 |
Foreign References:
| JP2008098595A | 2008-04-24 | |||
| JP2004304171A | 2004-10-28 | |||
| JPH01138712A | 1989-05-31 | |||
| JP2005347694A | 2005-12-15 |
Attorney, Agent or Firm:
YOKOI Koki (JP)
Koki Yokoi (JP)
Koki Yokoi (JP)
Download PDF:
Claims:
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