Title:
LASER PROCESSING SYSTEM HAVING IMPROVED LASER BEAM HOMOGENEITY
Document Type and Number:
WIPO Patent Application WO/2023/171837
Kind Code:
A1
Abstract:
Provided is a laser processing system having improved laser beam homogeneity, comprising: a laser unit for generating a laser beam; a beam expander unit for expanding the laser beam generated by the laser unit; a beam distribution control module for controlling the energy distribution of the laser beam by adjusting the beam divergence angle of the laser beam expanded by the beam expander unit; a slit unit for allowing only a portion of the laser beam controlled by the beam distribution control module to pass therethrough; and an optical system which is arranged on an optical path of the laser beam having passed through the slit unit, and which concentrates the laser beam so as to emit same at an object to be processed.
Inventors:
LEE CHUN JAE (KR)
SO YU JIN (KR)
SIM MYUNG SUNG (KR)
KIM SEON JOO (KR)
KIM BO GYEOM (KR)
SO YU JIN (KR)
SIM MYUNG SUNG (KR)
KIM SEON JOO (KR)
KIM BO GYEOM (KR)
Application Number:
PCT/KR2022/003412
Publication Date:
September 14, 2023
Filing Date:
March 11, 2022
Export Citation:
Assignee:
COWINDST CO LTD (KR)
International Classes:
B23K26/06; B23K26/064; B23K26/08; B23K26/082
Foreign References:
| KR100937767B1 | 2010-01-20 | |||
| KR20210125361A | 2021-10-18 | |||
| KR20160127462A | 2016-11-04 | |||
| JPH11352419A | 1999-12-24 | |||
| US8012841B2 | 2011-09-06 |
Attorney, Agent or Firm:
SEOHAN INTELLECTUAL PROPERTY LAW FIRM (KR)
Download PDF: