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Title:
LEARNING DEVICE, INFERENCE DEVICE, LEARNING MODEL GENERATION METHOD AND INFERENCE METHOD
Document Type and Number:
WIPO Patent Application WO/2020/049974
Kind Code:
A1
Abstract:
A trained model is provided which replaces a simulator of a manufacturing process. This learning device is provided with at least one memory and at least one processor. The at least one processor is configured so as to implement: acquisition of simulator parameters for image data; and inputting of the aforementioned image data and the aforementioned parameters into the learning model and learning of the learning model such that output of the learning model approaches the result of the simulator for the image data.

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Inventors:
NAKAGO KOSUKE (JP)
MOTOKI DAISUKE (JP)
WATANABE MASAKI (JP)
KOMATSU TOMOKI (JP)
Application Number:
PCT/JP2019/032025
Publication Date:
March 12, 2020
Filing Date:
August 15, 2019
Export Citation:
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Assignee:
PREFERRED NETWORKS INC (JP)
International Classes:
H01L21/00; C23C14/54; C23C16/52; G06N20/00; H01L21/02; H01L21/3065
Foreign References:
JP2011071296A2011-04-07
JPH11330449A1999-11-30
JP2010079896A2010-04-08
JP2007507888A2007-03-29
US20170194126A12017-07-06
JP2018049936A2018-03-29
JPH06224126A1994-08-12
JP2007227618A2007-09-06
JP2013518449A2013-05-20
JP2004040004A2004-02-05
JP2004153229A2004-05-27
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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