Title:
LIGHT BEAM MEASUREMENT DEVICE, LASER DEVICE AND LIGHT BEAM SEPARATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/208754
Kind Code:
A1
Abstract:
A light beam measurement device is provided with: a polarimeter which includes a first measurement unit beam splitter which is placed upon an optical path of laser light, and which measures the polarization state of partially reflected laser light in the first measurement unit beam splitter; a beam profile meter which includes a second measurement unit beam splitter which is placed upon the optical path of the laser light, and which measures the beam profile of the partially reflected laser light in the second measurement unit beam splitter; and a laser beam travel direction stability meter which measures stability of the laser beam travel direction for the laser light. The first measurement unit beam splitter and the second measurement unit beam splitter may be formed of material including CaF2.
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Inventors:
MORIYA MASATO (JP)
WAKABAYASHI OSAMU (JP)
WATABE YOSHINOBU (JP)
WAKABAYASHI OSAMU (JP)
WATABE YOSHINOBU (JP)
Application Number:
PCT/JP2014/067270
Publication Date:
December 31, 2014
Filing Date:
June 27, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/00; H01S3/134
Domestic Patent References:
WO2009125745A1 | 2009-10-15 | |||
WO2001055684A2 | 2001-08-02 | |||
WO2005033625A1 | 2005-04-14 |
Foreign References:
JP2007214189A | 2007-08-23 | |||
JPH11201869A | 1999-07-30 | |||
JP2002048911A | 2002-02-15 | |||
JP2008055436A | 2008-03-13 | |||
US4081760A | 1978-03-28 | |||
JP2009081363A | 2009-04-16 | |||
JP2006179600A | 2006-07-06 | |||
US20020118721A1 | 2002-08-29 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)
Patent business corporation エビス international patent firm (JP)
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