Title:
LIGHT DETECTION APPARATUS, DIGITAL DEVICE, AND METHOD FOR PRODUCING LIGHT DETECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/053401
Kind Code:
A1
Abstract:
Provided is a light detection apparatus capable of improving the saturation charge amount Qs of a photoelectric conversion unit. Specifically, the light detection apparatus is configured to comprise: a semiconductor substrate on which a plurality of photoelectric conversion units are formed; and an element separation part which has a trench part formed between photoelectric conversion units on the semiconductor substrate, a semiconductor layer disposed in the trench part and covering side walls of the trench part, and a functional layer disposed in a space in the trench part covered by the semiconductor layer. The photoelectric conversion units are configured to have an N-type semiconductor region in a region contacting the semiconductor layer. The semiconductor layer has a P-type impurity concentration of not more than 1e16/cm3. The functional layer induces holes in the functional layer side of the semiconductor layer.
Inventors:
YOSHIDA SHINICHI (JP)
HOJO NAOTO (JP)
HOJO NAOTO (JP)
Application Number:
PCT/JP2023/030367
Publication Date:
March 14, 2024
Filing Date:
August 23, 2023
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146; H01L31/10
Domestic Patent References:
| WO2012117931A1 | 2012-09-07 | |||
| WO2019093151A1 | 2019-05-16 |
Foreign References:
| JP2012038981A | 2012-02-23 | |||
| JPH08186257A | 1996-07-16 | |||
| JP2006114795A | 2006-04-27 |
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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