Title:
LIGHT-EMITTING DEVICE MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/153151
Kind Code:
A1
Abstract:
Provided is a light-emitting device manufacturing apparatus capable of continuously carrying out the steps from formation to sealing of a light-emitting element. This light-emitting device manufacturing apparatus is capable of forming a minute organic EL device having high luminance and high reliability, said manufacturing apparatus being capable of continuously carrying out a film formation step for forming an organic EL device, a lithography step, an etching step, and a sealing step by means of the formation of a protective layer in said order. In addition, the manufacturing apparatus is of an in-line type in which devices are arranged in the order of the manufacturing steps of the light-emitting device, and is capable of carrying out the manufacturing with high throughput.
Inventors:
EGUCHI SHINGO (JP)
ADACHI HIROKI (JP)
OKAZAKI KENICHI (JP)
YAMANE YASUMASA (JP)
KUSUMOTO NAOTO (JP)
YOSHIZUMI KENSUKE (JP)
YAMAZAKI SHUNPEI (JP)
ADACHI HIROKI (JP)
OKAZAKI KENICHI (JP)
YAMANE YASUMASA (JP)
KUSUMOTO NAOTO (JP)
YOSHIZUMI KENSUKE (JP)
YAMAZAKI SHUNPEI (JP)
Application Number:
PCT/IB2022/050107
Publication Date:
July 21, 2022
Filing Date:
January 07, 2022
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB (JP)
International Classes:
H05B33/10; B65G49/07; C23C14/56; C23C16/54; G09F9/00; H01L21/677; H01L27/32; H01L51/50; H05B33/02
Foreign References:
| JP2020094263A | 2020-06-18 | |||
| JP2014123727A | 2014-07-03 | |||
| JP2014070241A | 2014-04-21 | |||
| JP2014044810A | 2014-03-13 | |||
| JP2007227822A | 2007-09-06 | |||
| JP2007220360A | 2007-08-30 | |||
| US20150064825A1 | 2015-03-05 | |||
| KR20190072373A | 2019-06-25 |
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