LIGHT FLUX CONVERSION ELEMENT, LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD

Title:

LIGHT FLUX CONVERSION ELEMENT, LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD

Document Type and Number:

WIPO Patent Application WO/2005/050718

Kind Code:

A1

Abstract:

A lighting optical device capable of forming a bracelet-form lighting pupil distribution in a peripherally-polarized state with a light quantity loss satisfactorily controlled, the device comprising a light flux conversion element (50) for forming a bracelet-form light intensity distribution on a specified surface based on an incident light flux. The light flux conversion element comprises a first basic element (50A) formed of an optically-rotating optical material, for forming a first arcuate area distribution based on an incident light flux out of bracelet-form light intensity distribution, a second basic element (50B) for forming a second arcuate area distribution, a third basic element (50C) for forming a third arcuate area distribution, and fourth basic element (50D) for forming a fourth arcuate area distribution. Respective basic elements have mutually different thicknesses along the light transmitting direction.

Inventors:

TOYODA MITSUNORI (JP)

Application Number:

PCT/JP2004/016247

Publication Date:

June 02, 2005

Filing Date:

November 02, 2004

Export Citation:

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Assignee:

NIKON CORP (JP)
TOYODA MITSUNORI (JP)

International Classes:

G02B19/00; G02B27/00; G02B27/28; G02B27/44; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20; G02B27/00; G02B27/28; G02B19/00

Foreign References:

JPH07283119A	1995-10-27
JPH06188169A	1994-07-08
JPH0653120A	1994-02-25
JP2002075835A	2002-03-15
JP3246615B2	2002-01-15
JPH07283119A	1995-10-27
US20020196416A1	2002-12-26

Other References: