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Title:
LIGHT IRRADIATION DEVICE FOR EXPOSURE DEVICES, METHOD FOR CONTROLLING TURN-ON OF SAME, EXPOSURE DEVICE, EXPOSURE METHOD, AND SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2011/096365
Kind Code:
A1
Abstract:
Disclosed are a light irradiation device for exposure devices, a method for controlling turn-on of the same, an exposure device, an exposure method, and a substrate all enabling reduction of the replacement times of the light source units and the downtime of the device. The light irradiation device (80) is provided with a plurality of light source units (73) each including a lamp (71) and a reflecting mirror (72) for giving directivity to the light emitted from the lamp (71) and outputting the light, a plurality of cassettes (81) to which a prescribed number of light source units (73) can be attached, and a supporter (82) to which the cassettes (81) can be attached.

Inventors:
KAWASHIMA HIRONORI
KARUISHI SHUSAKU
NAGAI SHINICHIRO
HARADA TOMONORI
Application Number:
PCT/JP2011/051939
Publication Date:
August 11, 2011
Filing Date:
January 31, 2011
Export Citation:
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Assignee:
NSK LTD (JP)
KAWASHIMA HIRONORI
KARUISHI SHUSAKU
NAGAI SHINICHIRO
HARADA TOMONORI
International Classes:
G03F7/20
Foreign References:
JP2006324435A2006-11-30
JP2007333965A2007-12-27
JP2005227465A2005-08-25
JP2004207343A2004-07-22
JP2008191252A2008-08-21
JP2003295459A2003-10-15
JP2004361746A2004-12-24
JP2007005588A2007-01-11
JP2006278907A2006-10-12
JP2010040343A2010-02-18
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
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