Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/098387
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a light irradiation device that is capable of uniformly treating an entire surface to be treated of an object to be treated. This light irradiation device comprises: a treatment chamber inside which an object to be treated is placed; an ultraviolet-light-radiating lamp that irradiates the object to be treated with vacuum ultraviolet light; and a gas supply means that supplies a treatment gas including an active species source into the treatment chamber. The light irradiation device is characterised in that: a gas supply port for supplying the treatment gas to the treatment chamber and a gas discharge port that discharges gas inside the treatment chamber are provided to both sides of the area where the object to be treated is placed in the treatment chamber, and thereby a gas flow path through which the treatment gas flows from the gas supply port towards the gas discharge port is formed inside the treatment chamber; and a control is performed such that 60-95% of the amount of gas at the gas supply port reaches the gas discharge port.
Inventors:
HIROSE KENICHI (JP)
Application Number:
PCT/JP2014/080915
Publication Date:
July 02, 2015
Filing Date:
November 21, 2014
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
B08B7/00; H01L21/027; H01L21/304; H01L21/3065; H05K3/26
Domestic Patent References:
| WO2009022429A1 | 2009-02-19 |
Foreign References:
| JP2010010283A | 2010-01-14 | |||
| JP2009202138A | 2009-09-10 | |||
| JPH09283501A | 1997-10-31 | |||
| JP2008140830A | 2008-06-19 | |||
| JPH10135168A | 1998-05-22 | |||
| JP2003020112A | 2003-01-21 | |||
| JP2004162124A | 2004-06-10 |
Attorney, Agent or Firm:
OHI, Masahiko (JP)
Masahiko Oi (JP)
Masahiko Oi (JP)
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