LIGHT MEASUREMENT DEVICE AND OPTICAL AXIS ADJUSTMENT METHOD

WIPO Patent Application WO/2018/034188

A1

Provided is a light measurement device with which it is possible to maintain high measurement precision. This light measurement device has: a light source 11 for radiating light onto a measurement object 21; a branch part 31 for branching transmitted light or reflected light from the measurement object 21; a phase changing unit 41 for changing the phase of one of the branched lights; a phase fixing unit 51 for maintaining the phase of the other of the branched lights; an adjustment mechanism provided to the phase changing unit 41 or the phase fixing unit 51, the adjustment mechanism adjusting the direction in which the light advances; a multiplexer 61 for causing the lights emitted by each of the phase changing unit 41 and the phase fixing unit 51 to interfere with each other; a detection unit 71 for detecting the light that has been caused to interfere by the multiplexer 61; and a control unit 81 for controlling the adjustment mechanism, and adjusting the direction in which the light advances in the phase changing unit 41 or the phase fixing unit 51, on the basis of the brightness value of an interference image detected by the detection unit 71.

AKAGAWA TAKESHI (JP)
KUBO MASAHIRO (JP)
ABE KATSUMI (JP)
TAKOH KIMIYASU (JP)
ALTINTAS ERSIN (JP)
OHNO YUJI (JP)
ARIYAMA TETSURI (JP)
ISHIMARU ICHIRO (JP)

PCT/JP2017/028608

February 22, 2018

August 07, 2017

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NEC CORP (JP)
UNIV KAGAWA NAT UNIV CORP (JP)

G01B9/02; G01J3/45

WO2012063551A1

2012-05-18

JPS63168502A	1988-07-12
JP2011215084A	2011-10-27
JPH05180696A	1993-07-23
US20110176138A1	2011-07-21

MIYAZAKI Teruo et al. (JP)

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