Title:
LIGHT SOURCE DEVICE FOR EXPOSURE, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2020/179740
Kind Code:
A1
Abstract:
The present invention provides a light source device for exposure that is able to synthesize light from a plurality of LED elements having different peak wavelengths, and is compactly configured, an exposure device using the light source device, and an exposure method. This light source device for exposure is provided with: a first LED array (71) having a plurality of first LED elements (72) that emit light of a first peak wavelength; a second LED array (75) having a plurality of second LED elements (76) that emit light of a second peak wavelength different from the first peak wavelength; a photosynthetic element (80) that is provided with two dichroic films (81) for transmitting light in a specific wavelength band and reflecting light in the other wavelength bands, and synthesizes light from the first and second LED arrays (71, 75); and a fly-eye lens (65) on which the light synthesized by the photosynthetic element (80) is incident.
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Inventors:
MATSUZAKA MASAAKI (JP)
ENOMOTO YOSHIYUKI (JP)
TAKASE KAZUHIRO (JP)
YABE SHUNICHI (JP)
MATSUSHITA TOMOHISA (JP)
ENOMOTO YOSHIYUKI (JP)
TAKASE KAZUHIRO (JP)
YABE SHUNICHI (JP)
MATSUSHITA TOMOHISA (JP)
Application Number:
PCT/JP2020/008724
Publication Date:
September 10, 2020
Filing Date:
March 02, 2020
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G02B21/06; G03F7/20
Domestic Patent References:
| WO2012067246A1 | 2012-05-24 | |||
| WO2018211886A1 | 2018-11-22 |
Foreign References:
| JP2017161603A | 2017-09-14 | |||
| JP2010263218A | 2010-11-18 | |||
| JP2006184709A | 2006-07-13 | |||
| JP2016071243A | 2016-05-09 | |||
| JP2013162110A | 2013-08-19 | |||
| JP2014207414A | 2014-10-30 | |||
| JP2017187545A | 2017-10-12 | |||
| JP2015099247A | 2015-05-28 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P.C. (JP)
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