Title:
LIGHT SOURCE DEVICE AND RAW MATERIAL SUPPLY UNIT
Document Type and Number:
WIPO Patent Application WO/2024/084796
Kind Code:
A1
Abstract:
Provided are a light source device and a raw material supply unit which can inhibit the impact of debris. This light source device uses energy beam (EB) irradiation to convert a liquid raw material (23) into plasma and extract radiation (R), the light source device comprising a raw material storage part (24) and a rotating body (22). The raw material storage part stores the liquid raw material. The rotating body is disposed on the optical path of the energy beam, a portion thereof is immersed in the liquid raw material stored in the raw material storage part, and the rotating body rotates about a prescribed rotational axis (O) to thereby supply the liquid raw material to an incident region of the energy beam. With respect to the rotating body, at least one among a first immersion surface portion (63a) serving as a first side in an axial direction (Y direction) of the rotational axis of an immersion part (63) immersed into the liquid starting material by rotation, and a second immersion surface portion (63b) serving as a side opposite to the first immersion surface portion of the immersion part is formed as a protruding surface protruding to the front side such that the width in a direction (X direction, Z direction) orthogonal to the rotational axis changes along the axial direction of the rotational axis.
Inventors:
NAGANO AKIHISA (JP)
YAMATANI DAIKI (JP)
SATO FUKI (JP)
SHINODA KAZUHIKO (JP)
YAMATANI DAIKI (JP)
SATO FUKI (JP)
SHINODA KAZUHIKO (JP)
Application Number:
PCT/JP2023/030261
Publication Date:
April 25, 2024
Filing Date:
August 23, 2023
Export Citation:
Assignee:
USHIO DENKI KK (JP)
International Classes:
H05H1/24; G03F1/84; G03F7/20; G21K5/08; H05G2/00
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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