Title:
LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/188624
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a light source device capable of suppressing the influence of debris. A light source device according to one embodiment of the present invention is provided with a beam take-in part, a plate member, a starting material supply part, and a radiation take-out part. The beam take-in part takes in an energy beam. The plate member has a front surface and a back surface, is disposed at a position where the taken-in energy beam is incident on the front surface, and rotates with a direction orthogonal to the front surface as a rotation axis direction. The starting material supply part generates plasma by supplying a plasma starting material to an incidence region on which the energy beam is incident of the front surface. The radiation take-out part takes out radiation from the generated plasma and emits the radiation. The plate member is disposed such that a normal axis in the incidence region of the front surface deviates from an inter-axis region formed between an incidence axis of the energy beam that is incident on the incidence region and an emission axis of the radiation that is taken out from the plasma.
More Like This:
| JP2018085417 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE |
| WO/2020/116099 | EXPOSURE LIGHT SOURCE DEVICE |
| WO/2020/001278 | MASK TRANSMISSION DEVICE AND METHOD |
Inventors:
TERAMOTO YUSUKE (JP)
Application Number:
PCT/JP2022/047327
Publication Date:
October 05, 2023
Filing Date:
December 22, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2021009274A | 2021-01-28 | |||
| JP2021504763A | 2021-02-15 | |||
| JP2016181353A | 2016-10-13 | |||
| JP2013524531A | 2013-06-17 | |||
| US20130313423A1 | 2013-11-28 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
Download PDF: