Title:
LIGHT-SPOT IMAGE IRRADIATION DEVICE AND TRANSFER DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/117557
Kind Code:
A1
Abstract:
Provided are a light-spot image irradiation device for dividing a light ray and radiating a light spot image comprising light spots having uniform power on a surface to be irradiated, and a chip transfer device which uses the light-spot image irradiation device. Specifically, the present invention comprises at least a laser light source 11, a phase diffraction element 13 for dividing a laser beam B emitted from the laser light source 11 into a plurality of laser beams B1, and a light-spot image shifting means 16 for shifting a light-spot image 2 formed by the plurality of laser beams B1 in the in-plane direction of the surface S to be irradiated.
Inventors:
ARAI YOSHIYUKI (JP)
SUZUKI KAZUYOSHI (JP)
SUZUKI KAZUYOSHI (JP)
Application Number:
PCT/JP2020/044724
Publication Date:
June 17, 2021
Filing Date:
December 01, 2020
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
G02B27/10; B23K26/064; B23K26/066; B23K26/067; B23K26/082; G02B26/02; G02B26/08; G02F1/33; H01L21/52; H01L21/60
Domestic Patent References:
| WO2011071889A1 | 2011-06-16 | |||
| WO2019082694A1 | 2019-05-02 |
Foreign References:
| JP2003334683A | 2003-11-25 | |||
| US20100142022A1 | 2010-06-10 | |||
| US20090141251A1 | 2009-06-04 | |||
| JP2009130071A | 2009-06-11 | |||
| JP2002222761A | 2002-08-09 | |||
| US20060013680A1 | 2006-01-19 | |||
| JP2004330536A | 2004-11-25 |
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