Title:
LIGHT TRANSMITTING REGION FOR POLISHING PAD AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2016/098500
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a method of stably producing, in large volume, a light transmitting region that has a desired light transmissivity in a desired wavelength. This manufacturing method of a light transmitting region formed of a thermosetting polyurethane resin includes: a step for obtaining, beforehand, a correlation between a molding temperature when the light transmitting region is created by a sheet molding technique and the light transmissivity of the obtained light transmitting region in a specific wavelength; and a step for adjusting the molding temperature when the light transmitting region is created by the sheet molding technique on the basis of the obtained correlation to adjust the light transmissivity of the light transmitting region in the specific wavelength to the desired light transmissivity.
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Inventors:
SHIMIZU SHINJI (JP)
Application Number:
PCT/JP2015/082005
Publication Date:
June 23, 2016
Filing Date:
November 13, 2015
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT (US)
International Classes:
B24B37/24; H01L21/304
Foreign References:
| JP2008546167A | 2008-12-18 | |||
| JP2014113644A | 2014-06-26 | |||
| JP2013082035A | 2013-05-09 | |||
| JP2008288316A | 2008-11-27 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
Patent business corporation ユニアス international patent firm (JP)
Patent business corporation ユニアス international patent firm (JP)
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