Title:
LIGHTING APPARATUS, EXPOSURE APPARATUS AND MICRO DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2006/054544
Kind Code:
A1
Abstract:
A lighting apparatus illuminates a plane (M) to be illuminated, with illuminating light projected from a light source (5). The lighting apparatus is provided with an entrance side reflection type fly’s eye optical system (12) configured by arranging a plurality of reflection type partial optical systems in parallel; an outgoing side reflection type fly’s eye optical system (14) configured by arranging a plurality of reflection type partial optical systems corresponding to each of the plurality of reflection type partial optical systems configuring the entrance side reflection type fly’s eye optical system (12); and capacitor optical systems (18, 20) including two reflecting mirrors for guiding the illuminating light reflected by the outgoing side reflection type fly’s eye optical system (14) to the plane (M). At least one of curvature centers of the two reflecting mirrors is optically decentered from a normal line at the center of a lighting area on the plane (M).
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Inventors:
KOMATSUDA HIDEKI (JP)
Application Number:
PCT/JP2005/020928
Publication Date:
May 26, 2006
Filing Date:
November 15, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
KOMATSUDA HIDEKI (JP)
KOMATSUDA HIDEKI (JP)
International Classes:
H01L21/027; G02B5/10; G02B19/00; G03F7/20
Domestic Patent References:
| WO2004021086A1 | 2004-03-11 | |||
| WO2004038773A1 | 2004-05-06 |
Foreign References:
| JP2003045784A | 2003-02-14 | |||
| JP2003045774A | 2003-02-14 |
Other References:
See also references of EP 1814147A4
Attorney, Agent or Firm:
Fujimoto, Yoshihiro (6-1 Uchikanda 3-chom, Chiyoda-ku Tokyo 47, JP)
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