Title:
LIGHTING OPTICAL DEVICE, REGULATION METHOD FOR LIGHTING OPTICAL DEVICE, EXPOSURE SYSTEM, AND EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/2006/018972
Kind Code:
A1
Abstract:
A lighting optical device capable of almost uniformly regulating a pupil brightness distribution at every spot on a surface to be lighted while almost uniformly maintaining or regulating a lighting distribution on the surface to be lighted. A lighting optical device for lighting surfaces to be lighted (M, W) by a light flux from a light source (1). It comprises pupil distribution forming means (1-4) for forming a pupil brightness distribution having a specified brightness distribution on a lighting pupil surface, and regulators (8, 9) for independently regulating a pupil brightness distribution at every spot on surfaces to be lighted. The regulators are disposed on a light path between the pupil distribution forming means and the surfaces to be lighted, and have a plurality of regulation surfaces each having a specified transmittance distribution or reflectance distribution.
Inventors:
TANAKA HIROHISA (JP)
SHIGEMATSU KOJI (JP)
SHIGEMATSU KOJI (JP)
Application Number:
PCT/JP2005/014166
Publication Date:
February 23, 2006
Filing Date:
August 03, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
TANAKA HIROHISA (JP)
SHIGEMATSU KOJI (JP)
TANAKA HIROHISA (JP)
SHIGEMATSU KOJI (JP)
International Classes:
G02B19/00; H01L21/027; G03F7/20
Domestic Patent References:
| WO2003023832A1 | 2003-03-20 |
Foreign References:
| JP2003092253A | 2003-03-28 | |||
| JP2002100561A | 2002-04-05 | |||
| JPH09190969A | 1997-07-22 | |||
| US20030067591A1 | 2003-04-10 |
Other References:
See also references of EP 1798758A4
Attorney, Agent or Firm:
Yamaguchi, Takao (10 Kanda-tsukasacho 2-chome, Chiyoda-k, Tokyo 48, JP)
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