Title:
LINE NARROWING MODULE, METHOD FOR MANUFACTURING LINE NARROWING MODULE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/233628
Kind Code:
A1
Abstract:
This line narrowing module comprises: a mirror which includes a bottom surface and a light reflecting surface; a grating which diffuses light reflected by the reflecting surface; a base plate to which a bottom surface of the mirror is fixed by means of an adhesive; a rotational stage on which the base plate is disposed and which axially rotates the base plate about a rotational axis so that the mirror rotates about the rotational axis, the rotational axis being perpendicular to a plane on which wavelength dispersion of light is caused; and a drive unit which rotates the rotational stage about the rotational axis. The center of gravity of the mirror, the center of gravity of the adhesive, the center of gravity of the base plate, and the center of gravity of the rotational stage are positioned on the rotational axis.
Inventors:
YASHIRO MASANORI (JP)
OHGA HITOSHI (JP)
KUJIRA RYOUTA (JP)
OHGA HITOSHI (JP)
KUJIRA RYOUTA (JP)
Application Number:
PCT/JP2022/022505
Publication Date:
December 07, 2023
Filing Date:
June 02, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/137
Domestic Patent References:
| WO2020174582A1 | 2020-09-03 | |||
| WO2022085111A1 | 2022-04-28 |
Foreign References:
| JPH02307285A | 1990-12-20 | |||
| JP2010002776A | 2010-01-07 | |||
| JP2021173832A | 2021-11-01 | |||
| US6636536B1 | 2003-10-21 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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