Title:
LINEAR EVAPORATION SOURCE
Document Type and Number:
WIPO Patent Application WO/2024/010126
Kind Code:
A1
Abstract:
A linear evaporation source may comprise: a plurality of partition walls that are accommodated in a deposition space of a crucible, spaced apart from each other in the left and right directions, and divide the deposition space into a plurality of unit spaces; and a plurality of floor plates that are disposed closer to the inner bottom surface of the crucible among the inner bottom surface and an inner plate of the crucible. A linear evaporation source may comprise: a plurality of partition walls that are accommodated in a deposition space of a crucible, spaced apart from each other in the left and right directions, and divide the deposition space into a plurality of unit spaces; and a plurality of floor plates that are disposed closer to the inner bottom surface of the crucible among the inner bottom surface and an inner plate of the crucible. The plurality of unit spaces may include left unit spaces, right unit spaces, and a central unit space. The plurality of floor plates may include a left floor plate provided for each left unit space to guide a deposition material to a lower side of the central unit space, and a right floor plate provided for each right unit space to guide the deposition material to the lower side of the central unit space.
Inventors:
MOON BYOUNGJUN (KR)
JEON CHANGYEOP (KR)
CHOI KUNHOON (KR)
KIM INKYU (KR)
JEON CHANGYEOP (KR)
CHOI KUNHOON (KR)
KIM INKYU (KR)
Application Number:
PCT/KR2022/010152
Publication Date:
January 11, 2024
Filing Date:
July 12, 2022
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
C23C14/24; C23C14/12; H10K99/00
Foreign References:
| KR20220046983A | 2022-04-15 | |||
| KR20150069833A | 2015-06-24 | |||
| JP2011127217A | 2011-06-30 | |||
| KR20220090334A | 2022-06-29 | |||
| KR20190023228A | 2019-03-08 |
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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