LIQUID FEED PUMP AND FLOW RATE CONTROL DEVICE

Title:

LIQUID FEED PUMP AND FLOW RATE CONTROL DEVICE

Document Type and Number:

WIPO Patent Application WO/2012/147476

Kind Code:

A1

Abstract:

This invention provides a liquid feed pump with essentially no particle generation. This liquid feed pump is provided with: a pump housing; a diaphragm (180) which together with a concave surface forms a pump chamber (123) and which partitions the pump chamber (123) and a hole; a reciprocating member which is inserted into the hole so as to be capable of reciprocating motion and which deforms the diaphragm (180) by reciprocating motion; a drive unit (140) which displaces the reciprocating member in the reciprocating motion direction; a seal unit which, in a position around the outer circumference of the concave surface, clamps and seals the diaphragm (180); and a diaphragm receiving surface which, disposed between the seal unit and an opening, contacts the diaphragm (180) with a contact surface area that changes depending on the internal pressure in the pump chamber (123) and the displacement. The contact surface area decreases in response to increased displacement of the reciprocating member towards the concave surface, and increases in response to increased internal pressure in the pump chamber (123).

Inventors:

NITTA SHINICHI (JP)

Application Number:

PCT/JP2012/059254

Publication Date:

November 01, 2012

Filing Date:

April 04, 2012

Export Citation:

Click for automatic bibliography generation Help

Assignee:

CKD CORP (JP)
NITTA SHINICHI (JP)

International Classes:

F04B43/02; F04B43/04; F04B49/06

Foreign References:

JPS6030489A	1985-02-16
JPH07174075A	1995-07-11
JP2006118397A	2006-05-11
JP2007292011A	2007-11-08
JP2006118397A	2006-05-11
JP2003207494A	2003-07-25
JP2006029314A	2006-02-02
JPH062663A	1994-01-11
JPH062664A	1994-01-11
JPS62159778A	1987-07-15

Other References: